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      Canon Aligner MPA600FA Super

      Canon Aligner MPA600FA Super

      • Wafer size: 100mm ,125mm or 150mm , Flat wafers
      • Resolution: 1.5um (6” wafer surface)
      • Depth of focus: More than +/- 6 um at linewidth 1.5um
      • Distortion: ≦0.5um
      • Astigmatism: less than 2.0 μm
      • Uniformity: less than +/- 3%
      • Intensity: More than 500+/-50 mw/cm2
      • Pre-alignment accuracy: less than ?100um
      • Auto alignment: 3σ≦0.54um
      • Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )
      Canon Aligner MPA600FA

      Canon Aligner MPA600FA

      • Wafer size: 100mm ,125mm or 150mm , Flat wafers
      • Resolution: 1.5um (6” wafer surface)
      • Depth of focus: More than +/- 6 um at linewidth 1.5um
      • Distortion: ≦0.5um
      • Astigmatism: less than 2.0 μm
      • Uniformity: less than +/- 3%
      • Intensity: More than 500+/-50 mw/cm2
      • Pre-alignment accuracy: less than ?100um
      • Auto alignment: 3σ≦0.54um
      • Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )
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