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    2. Turnkey

      Canon FPA-3000 i5/ i5+ stepper.

      Canon FPA-3000 i5/ i5+ stepper.

      • Wafer size: 8” to 3”, Notch or Flat type.
      • Reticle size: 6”or 5”
      • Magnification: 1/5
      • Illumination System: 2.0kV or 2.7kV
      • Alignment Source: i-Line
      • X-Y Stage
      • Auto Focus
      • Wafer Leveling
      • TV-Pre-alignment
      • Wafer Auto Feeder
      • Reticle Changer
      • Option:
        • Reticle Barcode reader
        • Pellicle Particle Checker
        • Chuck Maintenance Tool
        • Triple HD or Dual HD
      电玩捕鱼